Ceramic material with acid, alkali, salt corrosion, high temperature, piezoelectric displacement and other fine features, wide range of applications. However, the brittle ceramic materials belong, high hardness, brittleness, its physical and mechanical properties (especially toughness and strength) are quite different metal materials, processing performance is poor, difficult process. When using ultra-precision cutting, grinding or polishing process traditional ceramic workpiece machining, machining parameters if not reasonable, then the surface will crack after processing, surface damage and other defects. The impact of processing parameters on the surface quality so as to provide a scientific basis for ultra-precision grinding of brittle materials paper mainly discusses the ultra-precision grinding of ceramics and other brittle material.